DOI: 10.1002/pssr.201409017. Ferroelectric properties and switching endurance of Hf0.5Zr0.5O2 films on TiN bottom and TiN or RuO2 top electrodes

Ferroelectric properties and switching endurance of Hf0.5Zr0.5O2 films on TiN bottom and TiN or RuO2 top electrodes

10.1002/pssr.201409017

Crossref journal-article

Wiley

physica status solidi (RRL) – Rapid Research Letters (311)

Abstract

Abstractmagnified imageThe effect of the top electrode (TE) on the ferroelectric properties and switching endurance of thin Hf0.5Zr0.5O2 films was examined. The TiN/Hf0.5Zr0.5O2/TiN capacitor can endure electric cycling up to 109 times, which is promising for the next‐generation memory. RuO2 TE was reduced during annealing due to the reactive TiN bottom electrode, resulting in the degradation of the ferroelectric properties and endurance. In addition, the endurance of the TiN/Hf0.5Zr0.5O2/TiN capacitors was optimized by changing the film thickness and the postannealing temperature. (© 2014 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)

Bibliography

Park, M. H., Kim, H. J., Kim, Y. J., Jeon, W., Moon, T., & Hwang, C. S. (2014). Ferroelectric properties and switching endurance of Hf0.5Zr0.5O2 films on TiN bottom and TiN or RuO2 top electrodes. Physica Status Solidi (RRL) â Rapid Research Letters, 8(6), 532â535. Portico.

Authors 6

Min Hyuk Park (first)
Han Joon Kim (additional)
Yu Jin Kim (additional)
Woojin Jeon (additional)
Taehwan Moon (additional)
Cheol Seong Hwang (additional)

References 20 Referenced 139

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{'key': 'e_1_2_6_12_2', 'first-page': '1', 'volume': '9', 'author': 'Chase M. W.', 'year': '1998', 'journal-title': 'J. Phys. Chem. Ref. Data, Monograph'} / J. Phys. Chem. Ref. Data, Monograph by Chase M. W. (1998)
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Dates

Type	When
Created	11 years, 6 months ago (Feb. 17, 2014, 7:06 a.m.)
Deposited	1 year, 11 months ago (Sept. 11, 2023, 7:01 p.m.)
Indexed	2 days, 18 hours ago (Aug. 19, 2025, 6:55 a.m.)
Issued	11 years, 6 months ago (Feb. 17, 2014)
Published	11 years, 6 months ago (Feb. 17, 2014)
Published Online	11 years, 6 months ago (Feb. 17, 2014)
Published Print	11 years, 2 months ago (June 1, 2014)

Funders 0

None

BibTeX

@article{Park_2014, title={Ferroelectric properties and switching endurance of Hf0.5Zr0.5O2 films on TiN bottom and TiN or RuO2 top electrodes}, volume={8}, ISSN={1862-6270}, url={http://dx.doi.org/10.1002/pssr.201409017}, DOI={10.1002/pssr.201409017}, number={6}, journal={physica status solidi (RRL) – Rapid Research Letters}, publisher={Wiley}, author={Park, Min Hyuk and Kim, Han Joon and Kim, Yu Jin and Jeon, Woojin and Moon, Taehwan and Hwang, Cheol Seong}, year={2014}, month=feb, pages={532–535} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2025,
        8,
        19
      ]
    ],
    "date-time": "2025-08-19T10:55:11Z",
    "timestamp": 1755600911236
  },
  "reference-count": 20,
  "publisher": "Wiley",
  "issue": "6",
  "license": [
    {
      "start": {
        "date-parts": [
          [
            2014,
            2,
            17
          ]
        ],
        "date-time": "2014-02-17T00:00:00Z",
        "timestamp": 1392595200000
      },
      "content-version": "vor",
      "delay-in-days": 0,
      "URL": "http://onlinelibrary.wiley.com/termsAndConditions#vor"
    }
  ],
  "content-domain": {
    "domain": [],
    "crossmark-restriction": false
  },
  "published-print": {
    "date-parts": [
      [
        2014,
        6
      ]
    ]
  },
  "abstract": "<jats:title>Abstract</jats:title><jats:p><jats:boxed-text content-type=\"graphic\" position=\"anchor\"><jats:graphic xmlns:xlink=\"http://www.w3.org/1999/xlink\" mimetype=\"image/gif\" position=\"anchor\" specific-use=\"enlarged-web-image\" xlink:href=\"graphic/mfocusissueoxides.gif\"><jats:alt-text>magnified image</jats:alt-text></jats:graphic></jats:boxed-text></jats:p><jats:p>The effect of the top electrode (TE) on the ferroelectric properties and switching endurance of thin Hf<jats:sub>0.5</jats:sub>Zr<jats:sub>0.5</jats:sub>O<jats:sub>2</jats:sub> films was examined. The TiN/Hf<jats:sub>0.5</jats:sub>Zr<jats:sub>0.5</jats:sub>O<jats:sub>2</jats:sub>/TiN capacitor can endure electric cycling up to 10<jats:sup>9</jats:sup> times, which is promising for the next\u2010generation memory. RuO<jats:sub>2</jats:sub> TE was reduced during annealing due to the reactive TiN bottom electrode, resulting in the degradation of the ferroelectric properties and endurance. In addition, the endurance of the TiN/Hf<jats:sub>0.5</jats:sub>Zr<jats:sub>0.5</jats:sub>O<jats:sub>2</jats:sub>/TiN capacitors was optimized by changing the film thickness and the postannealing temperature. (\u00a9 2014 WILEY\u2010VCH Verlag GmbH &amp; Co. KGaA, Weinheim)</jats:p>",
  "DOI": "10.1002/pssr.201409017",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2014,
        2,
        17
      ]
    ],
    "date-time": "2014-02-17T12:06:50Z",
    "timestamp": 1392638810000
  },
  "page": "532-535",
  "source": "Crossref",
  "is-referenced-by-count": 139,
  "title": "Ferroelectric properties and switching endurance of Hf<sub>0.5</sub>Zr<sub>0.5</sub>O<sub>2</sub> films on TiN bottom and TiN or RuO<sub>2</sub> top electrodes",
  "prefix": "10.1002",
  "volume": "8",
  "author": [
    {
      "given": "Min Hyuk",
      "family": "Park",
      "sequence": "first",
      "affiliation": []
    },
    {
      "given": "Han Joon",
      "family": "Kim",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "Yu Jin",
      "family": "Kim",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "Woojin",
      "family": "Jeon",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "Taehwan",
      "family": "Moon",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "Cheol Seong",
      "family": "Hwang",
      "sequence": "additional",
      "affiliation": []
    }
  ],
  "member": "311",
  "published-online": {
    "date-parts": [
      [
        2014,
        2,
        17
      ]
    ]
  },
  "reference": [
    {
      "key": "e_1_2_6_2_2",
      "doi-asserted-by": "publisher",
      "DOI": "10.1146/annurev.matsci.30.1.263"
    },
    {
      "key": "e_1_2_6_3_2",
      "doi-asserted-by": "publisher",
      "DOI": "10.1063/1.110436"
    },
    {
      "key": "e_1_2_6_4_2",
      "doi-asserted-by": "publisher",
      "DOI": "10.1063/1.126786"
    },
    {
      "key": "e_1_2_6_5_2",
      "doi-asserted-by": "publisher",
      "DOI": "10.1002/pssa.2211330242"
    },
    {
      "key": "e_1_2_6_6_2",
      "doi-asserted-by": "publisher",
      "DOI": "10.1063/1.359737"
    },
    {
      "key": "e_1_2_6_7_2",
      "doi-asserted-by": "publisher",
      "DOI": "10.1063/1.3636417"
    },
    {
      "key": "e_1_2_6_8_2",
      "doi-asserted-by": "publisher",
      "DOI": "10.1063/1.4798265"
    },
    {
      "key": "e_1_2_6_9_2",
      "doi-asserted-by": "publisher",
      "DOI": "10.1116/1.1914815"
    },
    {
      "key": "e_1_2_6_10_2",
      "doi-asserted-by": "publisher",
      "DOI": "10.1016/j.ccr.2013.04.010"
    },
    {
      "key": "e_1_2_6_11_2",
      "doi-asserted-by": "publisher",
      "DOI": "10.1016/0040-6031(88)87197-1"
    },
    {
      "key": "e_1_2_6_12_2",
      "first-page": "1",
      "volume": "9",
      "author": "Chase M. W.",
      "year": "1998",
      "journal-title": "J. Phys. Chem. Ref. Data, Monograph"
    },
    {
      "key": "e_1_2_6_13_2",
      "doi-asserted-by": "publisher",
      "DOI": "10.1038/nnano.2009.456"
    },
    {
      "key": "e_1_2_6_14_2",
      "doi-asserted-by": "publisher",
      "DOI": "10.1021/am302604e"
    },
    {
      "key": "e_1_2_6_15_2",
      "doi-asserted-by": "publisher",
      "DOI": "10.1080/10584589708221681"
    },
    {
      "key": "e_1_2_6_16_2",
      "doi-asserted-by": "publisher",
      "DOI": "10.1063/1.108438"
    },
    {
      "key": "e_1_2_6_17_2",
      "doi-asserted-by": "publisher",
      "DOI": "10.1063/1.113234"
    },
    {
      "key": "e_1_2_6_18_2",
      "doi-asserted-by": "publisher",
      "DOI": "10.1063/1.121610"
    },
    {
      "key": "e_1_2_6_19_2",
      "doi-asserted-by": "publisher",
      "DOI": "10.1063/1.4811483"
    },
    {
      "key": "e_1_2_6_20_2",
      "doi-asserted-by": "publisher",
      "DOI": "10.1002/adma.200701085"
    },
    {
      "key": "e_1_2_6_21_2",
      "doi-asserted-by": "publisher",
      "DOI": "10.1109/TDMR.2012.2216269"
    }
  ],
  "container-title": "physica status solidi (RRL) \u2013 Rapid Research Letters",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "https://api.wiley.com/onlinelibrary/tdm/v1/articles/10.1002%2Fpssr.201409017",
      "content-type": "unspecified",
      "content-version": "vor",
      "intended-application": "text-mining"
    },
    {
      "URL": "https://onlinelibrary.wiley.com/doi/pdf/10.1002/pssr.201409017",
      "content-type": "unspecified",
      "content-version": "vor",
      "intended-application": "similarity-checking"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2023,
        9,
        11
      ]
    ],
    "date-time": "2023-09-11T23:01:47Z",
    "timestamp": 1694473307000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://onlinelibrary.wiley.com/doi/10.1002/pssr.201409017"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        2014,
        2,
        17
      ]
    ]
  },
  "references-count": 20,
  "journal-issue": {
    "issue": "6",
    "published-print": {
      "date-parts": [
        [
          2014,
          6
        ]
      ]
    }
  },
  "alternative-id": [
    "10.1002/pssr.201409017"
  ],
  "URL": "http://dx.doi.org/10.1002/pssr.201409017",
  "relation": {},
  "ISSN": [
    "1862-6254",
    "1862-6270"
  ],
  "subject": [],
  "container-title-short": "Physica Rapid Research Ltrs",
  "published": {
    "date-parts": [
      [
        2014,
        2,
        17
      ]
    ]
  }
}