Abstract
AbstractCrystalline Si substrates are studied for pressure‐induced phase transformation under indentation at room temperature (RT) using a Berkovich tip. Raman spectroscopy, as a nondestructive tool, is used for the identification of the transformed phases. Raman lines as well as area mapping are used for locating the phases in the indented region. Calculation of pressure contours in the indented region is used for understanding the phase distribution. We report here a comprehensive study of all the phases of Si, reported so far, leading to possible understanding of material properties useful for possible electromechanical applications. As a major finding, distribution of the amorphous phase in the indented region deviates from the conventional wisdom of being in the central region alone. We present phase mapping results for both Si(100) and Si(111) substrates. Copyright © 2009 John Wiley & Sons, Ltd.
References
28
Referenced
19
10.1103/PhysRevLett.60.2156
10.1088/0022-3727/36/11/310
10.1016/j.actamat.2004.12.025
10.1016/B978-012513910-6/50024-4
10.1016/S0921-5093(02)00015-1
10.1063/1.2907851
10.1063/1.117346
10.1063/1.1632031
10.1016/j.mejo.2006.09.007
10.1063/1.124554
10.1103/PhysRevB.34.4679
10.1103/PhysRevB.52.4072
10.1063/1.1539916
10.1063/1.1642739
10.1557/JMR.2000.0253
10.1080/01418610208235704
10.1063/1.1544429
10.1063/1.1541110
10.1016/j.actamat.2005.06.030
10.4028/www.scientific.net/KEM.312.345
10.1088/0957-4484/11/3/307
10.4028/www.scientific.net/KEM.233-236.603
10.1557/JMR.1992.1564
10.1016/S0022-5096(97)00086-0
10.1016/S1468-6996(01)00150-4
10.1080/09500830310001594273
10.1017/CBO9781139171731.006
10.1063/1.1713863
Dates
Type | When |
---|---|
Created | 15 years, 11 months ago (Sept. 1, 2009, 5:55 a.m.) |
Deposited | 1 year, 9 months ago (Nov. 21, 2023, 6:09 a.m.) |
Indexed | 1 day, 12 hours ago (Aug. 21, 2025, 2:19 p.m.) |
Issued | 15 years, 11 months ago (Sept. 1, 2009) |
Published | 15 years, 11 months ago (Sept. 1, 2009) |
Published Online | 15 years, 11 months ago (Sept. 1, 2009) |
Published Print | 15 years, 5 months ago (March 1, 2010) |
@article{Das_2009, title={A complete Raman mapping of phase transitions in Si under indentation}, volume={41}, ISSN={1097-4555}, url={http://dx.doi.org/10.1002/jrs.2430}, DOI={10.1002/jrs.2430}, number={3}, journal={Journal of Raman Spectroscopy}, publisher={Wiley}, author={Das, C. R. and Hsu, H. C. and Dhara, S. and Bhaduri, A. K. and Raj, B. and Chen, L. C. and Chen, K. H. and Albert, S. K. and Ray, A. and Tzeng, Y.}, year={2009}, month=sep, pages={334–339} }