DOI: 10.1002/jemt.20597. Thickness measurements with electron energy loss spectroscopy

Thickness measurements with electron energy loss spectroscopy

10.1002/jemt.20597

Crossref journal-article

Wiley

Microscopy Research and Technique (311)

Abstract

AbstractMeasurements of thickness using electron energy loss spectroscopy (EELS) are revised. Absolute thickness values can be quickly and accurately determined with the Kramers‐Kronig sum method. The EELS data analysis is even much easier with the log‐ratio method, however, absolute calibration of this method requires knowledge of the mean free path of inelastic electron scattering λ. The latter has been measured here in a wide range of solids and a scaling law λ ∼ ρ−0.3 versus mass density ρ has been revealed. EELS measurements critically depend on the excitation and collection angles. This dependence has been studied experimentally and theoretically and an efficient model has been formulated. Microsc. Res. Tech., 2008. © 2008 Wiley‐Liss, Inc.

Bibliography

Iakoubovskii, K., Mitsuishi, K., Nakayama, Y., & Furuya, K. (2008). Thickness measurements with electron energy loss spectroscopy. Microscopy Research and Technique, 71(8), 626â631. Portico.

Authors 4

K. Iakoubovskii (first)
K. Mitsuishi (additional)
Y. Nakayama (additional)
K. Furuya (additional)

References 12 Referenced 213

Dates

Type	When
Created	17 years, 3 months ago (May 3, 2008, 11:13 p.m.)
Deposited	1 year, 9 months ago (Nov. 14, 2023, 5:45 a.m.)
Indexed	2 days, 11 hours ago (Aug. 31, 2025, 7:33 p.m.)
Issued	17 years, 4 months ago (May 2, 2008)
Published	17 years, 4 months ago (May 2, 2008)
Published Online	17 years, 4 months ago (May 2, 2008)
Published Print	17 years, 1 month ago (Aug. 1, 2008)

Funders 0

None

BibTeX

@article{Iakoubovskii_2008, title={Thickness measurements with electron energy loss spectroscopy}, volume={71}, ISSN={1097-0029}, url={http://dx.doi.org/10.1002/jemt.20597}, DOI={10.1002/jemt.20597}, number={8}, journal={Microscopy Research and Technique}, publisher={Wiley}, author={Iakoubovskii, K. and Mitsuishi, K. and Nakayama, Y. and Furuya, K.}, year={2008}, month=may, pages={626–631} }

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