DOI: 10.1002/jemt.20514. Evaluation of top, angle, and side cleaned FIB samples for TEM analysis

Evaluation of top, angle, and side cleaned FIB samples for TEM analysis

10.1002/jemt.20514

Crossref journal-article

Wiley

Microscopy Research and Technique (311)

Abstract

AbstractTEM specimens of a LaAlO3/SrTiO3 multilayer are prepared by FIB with internal lift out. Using a Ga+1 beam of 5 kV, a final cleaning step yielding top, top‐angle, side, and bottom‐angle cleaning is performed. Different cleaning procedures, which can be easily implemented in a dual beam FIB system, are described and compared; all cleaning types produce thin lamellae, useful for HRTEM and HAADF‐STEM work up to atomic resolution. However, the top cleaned lamellae are strongly affected by the curtain effect. Top‐angle cleaned specimens show an amorphous layer of around 5 nm at the specimen surfaces, due to damage and redeposition. Furthermore, it is observed that the LaAlO3 layers are preferentially destroyed and transformed into amorphous material, during the thinning process. Microsc. Res. Tech., 2007. © 2007 Wiley‐Liss, Inc.

Bibliography

Montoya, E., Bals, S., Rossell, M. D., Schryvers, D., & Van Tendeloo, G. (2007). Evaluation of top, angle, and side cleaned FIB samples for TEM analysis. Microscopy Research and Technique, 70(12), 1060â1071. Portico.

Authors 5

Eduardo Montoya (first)
Sara Bals (additional)
Marta D. Rossell (additional)
Dominique Schryvers (additional)
Gustaaf Van Tendeloo (additional)

References 21 Referenced 41

10.1016/S0168-583X(01)00334-2
10.1016/S0968-4328(03)00007-6
10.1093/jmicro/dfl001
10.1038/nmat1675
10.1093/jmicro/dfh078
10.1093/jmicro/dfh058
10.1093/jmicro/dfh080
10.1016/j.ultramic.2006.09.004
10.1002/jemt.20324
MontoyaE BalsS RossellMD SchryversD Van TendelooG.2006.Evaluation of angle cleaned TEM specimens prepared by FIB. Proceedings of the Joint Meeting NVvM/BVM. Lunteren The Netherlands 26–28 November 2006 in Jaarboek 2006 pp.50–51. ISSN 1389‐5362.
10.1038/nature02308
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10.1111/j.0022-2720.2004.01327.x
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10.1093/jmicro/dfh062
10.1016/j.matlet.2005.08.018
ZieglerJF.2003.SRIM version: SRIM‐2003‐26. Available at:www.SRIM.org.

Dates

Type	When
Created	18 years ago (Aug. 24, 2007, 9:22 p.m.)
Deposited	1 year, 10 months ago (Sept. 29, 2023, 1:41 a.m.)
Indexed	1 month ago (July 24, 2025, 7:25 a.m.)
Issued	18 years ago (Aug. 23, 2007)
Published	18 years ago (Aug. 23, 2007)
Published Online	18 years ago (Aug. 23, 2007)
Published Print	17 years, 8 months ago (Dec. 1, 2007)

Funders 0

None

BibTeX

@article{Montoya_2007, title={Evaluation of top, angle, and side cleaned FIB samples for TEM analysis}, volume={70}, ISSN={1097-0029}, url={http://dx.doi.org/10.1002/jemt.20514}, DOI={10.1002/jemt.20514}, number={12}, journal={Microscopy Research and Technique}, publisher={Wiley}, author={Montoya, Eduardo and Bals, Sara and Rossell, Marta D. and Schryvers, Dominique and Van Tendeloo, Gustaaf}, year={2007}, month=aug, pages={1060–1071} }

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