DOI: 10.1002/adma.200502286. Three‐Dimensional Optical Lithography for Photonic Microstructures

Three‐Dimensional Optical Lithography for Photonic Microstructures

10.1002/adma.200502286

Crossref journal-article

Wiley

Advanced Materials (311)

Bibliography

Scrimgeour, J., Sharp, D. N., Blanford, C. F., Roche, O. M., Denning, R. G., & Turberfield, A. J. (2006). ThreeâDimensional Optical Lithography for Photonic Microstructures. Advanced Materials, 18(12), 1557â1560. Portico.

Authors 6

J. Scrimgeour (first)
D. N. Sharp (additional)
C. F. Blanford (additional)
O. M. Roche (additional)
R. G. Denning (additional)
A. J. Turberfield (additional)

References 33 Referenced 67

10.1103/PhysRevLett.67.3380
10.1103/PhysRevLett.77.3787
10.1103/PhysRevLett.58.2059
10.1103/PhysRevLett.58.2486
10.1038/nmat1097
10.1038/35003523
10.1038/17989
10.1063/1.123367
10.1038/nmat1155
10.1039/b207441a
10.1063/1.1636271
10.1002/adma.200401764
10.1002/1521-4095(20020219)14:4<271::AID-ADMA271>3.0.CO;2-Y
10.1002/adfm.200500345
10.1002/adma.200500026
10.1063/1.123364
10.1364/OL.27.002158
10.1002/adma.200400436
10.1126/science.289.5479.604
10.1103/PhysRevB.59.R15579
10.1038/nature02575
10.1002/adma.200400648
10.1073/pnas.0403048101
The International Technology Roadmap for Semiconductors 2003 Edition Semiconductor Industry Association San Jose CA2003. Available from URLhttp://public.itrs.net/(last accessed: March 20 2006)
10.1364/OL.30.000881
10.1116/1.588297
10.1063/1.121850
10.1021/ac0015319
{'key': 'e_1_2_1_30_2', 'first-page': '1', 'volume': '5720', 'author': 'Sharp D. N.', 'year': '2005', 'journal-title': 'Proc. SPIE‐Int. Soc. Opt. Eng.'} / Proc. SPIE‐Int. Soc. Opt. Eng. by Sharp D. N. (2005)
10.1021/la00048a013
10.1111/j.1365-2818.1993.tb03315.x
10.1002/adma.200502287
M. Ritala M. Leskelä inHandbook of Thin Film Materials Vol. I (Ed: H. S. Nalwa) Harcourt Academic London UK2002 Ch. 2.

Dates

Type	When
Created	19 years, 3 months ago (May 18, 2006, 5:05 a.m.)
Deposited	1 year, 9 months ago (Nov. 20, 2023, 5:21 p.m.)
Indexed	11 months, 2 weeks ago (Sept. 19, 2024, 11:05 a.m.)
Issued	19 years, 3 months ago (May 18, 2006)
Published	19 years, 3 months ago (May 18, 2006)
Published Online	19 years, 3 months ago (May 18, 2006)
Published Print	19 years, 2 months ago (June 19, 2006)

Funders 0

None

BibTeX

@article{Scrimgeour_2006, title={Three‐Dimensional Optical Lithography for Photonic Microstructures}, volume={18}, ISSN={1521-4095}, url={http://dx.doi.org/10.1002/adma.200502286}, DOI={10.1002/adma.200502286}, number={12}, journal={Advanced Materials}, publisher={Wiley}, author={Scrimgeour, J. and Sharp, D. N. and Blanford, C. F. and Roche, O. M. and Denning, R. G. and Turberfield, A. J.}, year={2006}, month=may, pages={1557–1560} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2024,
        9,
        19
      ]
    ],
    "date-time": "2024-09-19T15:05:21Z",
    "timestamp": 1726758321870
  },
  "reference-count": 33,
  "publisher": "Wiley",
  "issue": "12",
  "license": [
    {
      "start": {
        "date-parts": [
          [
            2006,
            5,
            18
          ]
        ],
        "date-time": "2006-05-18T00:00:00Z",
        "timestamp": 1147910400000
      },
      "content-version": "vor",
      "delay-in-days": 0,
      "URL": "http://onlinelibrary.wiley.com/termsAndConditions#vor"
    }
  ],
  "content-domain": {
    "domain": [],
    "crossmark-restriction": false
  },
  "published-print": {
    "date-parts": [
      [
        2006,
        6,
        19
      ]
    ]
  },
  "DOI": "10.1002/adma.200502286",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2006,
        5,
        18
      ]
    ],
    "date-time": "2006-05-18T09:05:08Z",
    "timestamp": 1147943108000
  },
  "page": "1557-1560",
  "source": "Crossref",
  "is-referenced-by-count": 67,
  "title": "Three\u2010Dimensional Optical Lithography for Photonic Microstructures",
  "prefix": "10.1002",
  "volume": "18",
  "author": [
    {
      "given": "J.",
      "family": "Scrimgeour",
      "sequence": "first",
      "affiliation": []
    },
    {
      "given": "D.\u2009N.",
      "family": "Sharp",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "C.\u2009F.",
      "family": "Blanford",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "O.\u2009M.",
      "family": "Roche",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "R.\u2009G.",
      "family": "Denning",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "A.\u2009J.",
      "family": "Turberfield",
      "sequence": "additional",
      "affiliation": []
    }
  ],
  "member": "311",
  "published-online": {
    "date-parts": [
      [
        2006,
        5,
        18
      ]
    ]
  },
  "reference": [
    {
      "key": "e_1_2_1_2_2",
      "doi-asserted-by": "publisher",
      "DOI": "10.1103/PhysRevLett.67.3380"
    },
    {
      "key": "e_1_2_1_3_2",
      "doi-asserted-by": "publisher",
      "DOI": "10.1103/PhysRevLett.77.3787"
    },
    {
      "key": "e_1_2_1_4_2",
      "doi-asserted-by": "publisher",
      "DOI": "10.1103/PhysRevLett.58.2059"
    },
    {
      "key": "e_1_2_1_5_2",
      "doi-asserted-by": "publisher",
      "DOI": "10.1103/PhysRevLett.58.2486"
    },
    {
      "key": "e_1_2_1_6_2",
      "doi-asserted-by": "publisher",
      "DOI": "10.1038/nmat1097"
    },
    {
      "key": "e_1_2_1_7_2",
      "doi-asserted-by": "publisher",
      "DOI": "10.1038/35003523"
    },
    {
      "key": "e_1_2_1_8_2",
      "doi-asserted-by": "publisher",
      "DOI": "10.1038/17989"
    },
    {
      "key": "e_1_2_1_9_2",
      "doi-asserted-by": "publisher",
      "DOI": "10.1063/1.123367"
    },
    {
      "key": "e_1_2_1_10_2",
      "doi-asserted-by": "publisher",
      "DOI": "10.1038/nmat1155"
    },
    {
      "key": "e_1_2_1_11_2",
      "doi-asserted-by": "publisher",
      "DOI": "10.1039/b207441a"
    },
    {
      "key": "e_1_2_1_12_2",
      "doi-asserted-by": "publisher",
      "DOI": "10.1063/1.1636271"
    },
    {
      "key": "e_1_2_1_13_2",
      "doi-asserted-by": "publisher",
      "DOI": "10.1002/adma.200401764"
    },
    {
      "key": "e_1_2_1_14_2",
      "doi-asserted-by": "publisher",
      "DOI": "10.1002/1521-4095(20020219)14:4<271::AID-ADMA271>3.0.CO;2-Y"
    },
    {
      "key": "e_1_2_1_15_2",
      "doi-asserted-by": "publisher",
      "DOI": "10.1002/adfm.200500345"
    },
    {
      "key": "e_1_2_1_16_2",
      "doi-asserted-by": "publisher",
      "DOI": "10.1002/adma.200500026"
    },
    {
      "key": "e_1_2_1_17_2",
      "doi-asserted-by": "publisher",
      "DOI": "10.1063/1.123364"
    },
    {
      "key": "e_1_2_1_18_2",
      "doi-asserted-by": "publisher",
      "DOI": "10.1364/OL.27.002158"
    },
    {
      "key": "e_1_2_1_19_2",
      "doi-asserted-by": "publisher",
      "DOI": "10.1002/adma.200400436"
    },
    {
      "key": "e_1_2_1_20_2",
      "doi-asserted-by": "publisher",
      "DOI": "10.1126/science.289.5479.604"
    },
    {
      "key": "e_1_2_1_21_2",
      "doi-asserted-by": "publisher",
      "DOI": "10.1103/PhysRevB.59.R15579"
    },
    {
      "key": "e_1_2_1_22_2",
      "doi-asserted-by": "publisher",
      "DOI": "10.1038/nature02575"
    },
    {
      "key": "e_1_2_1_23_2",
      "doi-asserted-by": "publisher",
      "DOI": "10.1002/adma.200400648"
    },
    {
      "key": "e_1_2_1_24_2",
      "doi-asserted-by": "publisher",
      "DOI": "10.1073/pnas.0403048101"
    },
    {
      "key": "e_1_2_1_25_2",
      "unstructured": "The International Technology Roadmap for Semiconductors 2003 Edition Semiconductor Industry Association San Jose CA2003. Available from URLhttp://public.itrs.net/(last accessed: March 20 2006)"
    },
    {
      "key": "e_1_2_1_26_2",
      "doi-asserted-by": "publisher",
      "DOI": "10.1364/OL.30.000881"
    },
    {
      "key": "e_1_2_1_27_2",
      "doi-asserted-by": "publisher",
      "DOI": "10.1116/1.588297"
    },
    {
      "key": "e_1_2_1_28_2",
      "doi-asserted-by": "publisher",
      "DOI": "10.1063/1.121850"
    },
    {
      "key": "e_1_2_1_29_2",
      "doi-asserted-by": "publisher",
      "DOI": "10.1021/ac0015319"
    },
    {
      "key": "e_1_2_1_30_2",
      "first-page": "1",
      "volume": "5720",
      "author": "Sharp D. N.",
      "year": "2005",
      "journal-title": "Proc. SPIE\u2010Int. Soc. Opt. Eng."
    },
    {
      "key": "e_1_2_1_31_2",
      "doi-asserted-by": "publisher",
      "DOI": "10.1021/la00048a013"
    },
    {
      "key": "e_1_2_1_32_2",
      "doi-asserted-by": "publisher",
      "DOI": "10.1111/j.1365-2818.1993.tb03315.x"
    },
    {
      "key": "e_1_2_1_33_2",
      "doi-asserted-by": "publisher",
      "DOI": "10.1002/adma.200502287"
    },
    {
      "key": "e_1_2_1_34_2",
      "unstructured": "M. Ritala M. Leskel\u00e4 inHandbook of Thin Film Materials Vol.\u2009I (Ed: H.\u2009S. Nalwa) Harcourt Academic London UK2002 Ch.\u20092."
    }
  ],
  "container-title": "Advanced Materials",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "https://api.wiley.com/onlinelibrary/tdm/v1/articles/10.1002%2Fadma.200502286",
      "content-type": "unspecified",
      "content-version": "vor",
      "intended-application": "text-mining"
    },
    {
      "URL": "https://onlinelibrary.wiley.com/doi/pdf/10.1002/adma.200502286",
      "content-type": "unspecified",
      "content-version": "vor",
      "intended-application": "similarity-checking"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2023,
        11,
        20
      ]
    ],
    "date-time": "2023-11-20T22:21:24Z",
    "timestamp": 1700518884000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://onlinelibrary.wiley.com/doi/10.1002/adma.200502286"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        2006,
        5,
        18
      ]
    ]
  },
  "references-count": 33,
  "journal-issue": {
    "issue": "12",
    "published-print": {
      "date-parts": [
        [
          2006,
          6,
          19
        ]
      ]
    }
  },
  "alternative-id": [
    "10.1002/adma.200502286"
  ],
  "URL": "http://dx.doi.org/10.1002/adma.200502286",
  "relation": {},
  "ISSN": [
    "0935-9648",
    "1521-4095"
  ],
  "subject": [],
  "container-title-short": "Advanced Materials",
  "published": {
    "date-parts": [
      [
        2006,
        5,
        18
      ]
    ]
  }
}