DOI: 10.1002/adma.200390008. Fabrication of Two‐Dimensional Arrays of CdSe Pillars Using E‐Beam Lithography and Electrochemical Deposition

Fabrication of Two‐Dimensional Arrays of CdSe Pillars Using E‐Beam Lithography and Electrochemical Deposition

10.1002/adma.200390008

Crossref journal-article

Wiley

Advanced Materials (311)

Abstract

Two‐dimensional arrays of high refractive index structures can be fabricated using a combination of e‐beam lithography for pattern definition and electrochemical deposition for structure formation. The potential of this method is demonstrated for CdSe, where nanopillars, mushrooms (see Figure), walls, and crosses are prepared. Such arrays have potential in optical device applications such as photonic crystals and waveguides.

Bibliography

Su, Y. âW., Wu, C. âS., Chen, C. âC., & Chen, C. âD. (2003). Fabrication of TwoâDimensional Arrays of CdSe Pillars Using EâBeam Lithography and Electrochemical Deposition. Advanced Materials, 15(1), 49â51. Portico.

Authors 4

Y.‐W. Su (first)
C.‐S. Wu (additional)
C.‐C. Chen (additional)
C.‐D. Chen (additional)

References 11 Referenced 50

10.1103/PhysRevLett.58.2059
10.1126/science.282.5387.274
10.1038/35036532
10.1038/35013024
10.1002/1521-4095(200105)13:10<721::AID-ADMA721>3.0.CO;2-A
10.1038/28343
10.1063/1.1420584
10.1038/45137
10.1021/cm00018a014
{'key': 'e_1_2_1_11_2', 'first-page': '2951', 'volume': '42', 'author': 'Tao M.', 'year': '2001', 'journal-title': 'IEEE Trans. Electron Devices Lett.'} / IEEE Trans. Electron Devices Lett. by Tao M. (2001)
10.1002/(SICI)1521-4095(200004)12:7<531::AID-ADMA531>3.0.CO;2-S

Dates

Type	When
Created	21 years, 2 months ago (June 28, 2004, 5:24 p.m.)
Deposited	1 year, 9 months ago (Nov. 20, 2023, 10:40 p.m.)
Indexed	1 week, 5 days ago (Aug. 21, 2025, 12:35 p.m.)
Issued	22 years, 8 months ago (Jan. 3, 2003)
Published	22 years, 8 months ago (Jan. 3, 2003)
Published Online	22 years, 7 months ago (Jan. 10, 2003)
Published Print	22 years, 8 months ago (Jan. 3, 2003)

Funders 0

None

BibTeX

@article{Su_2003, title={Fabrication of Two‐Dimensional Arrays of CdSe Pillars Using E‐Beam Lithography and Electrochemical Deposition}, volume={15}, ISSN={1521-4095}, url={http://dx.doi.org/10.1002/adma.200390008}, DOI={10.1002/adma.200390008}, number={1}, journal={Advanced Materials}, publisher={Wiley}, author={Su, Y.‐W. and Wu, C.‐S. and Chen, C.‐C. and Chen, C.‐D.}, year={2003}, month=jan, pages={49–51} }

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